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Development of Integrated Biosensors and NanoElectronic Devices in the next CMOS Stage
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| Author:
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CRISTIAN RAVARIU, CATALIN PARVULESCU, ELENA MANEA, DAN MIHAIESCU, ALINA MOROSAN
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| Abstract:
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This paper gives an overview about the CMOS technology evolution, as the main engine of the digital society.
Soon, the CMOS scaling down limits are reached. Beyond CMOS, the paper proposes few directions on bionano-electronics,
emphasizing some solutions for the co-integration of the Si devices and bio-recognition
elements in Bio-FET transistors. Then, a second contribution in nanoelectronics is presented - the Nothing On
Insulator transistor development. Its reduced sizes and tunneling mechanisms offer the optimum performances
for the future CMOS co-integration. During the next years, the applied micro- and nano-technologies for
electrical engineering have to inherently include combinations of biomaterials and nanomaterials able for
complex devices fabrication.
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| Keyword:
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nano-component, CMOS, digital products, biosensors, enzymes
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| EOI:
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| DOI:
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| Download:
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